Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6469310 | Radiation source for extreme ultraviolet radiation, e.g. for use in lithographic projection apparatus | Frederik Bijkerk, Cornelis Cornelia De Bruijn, Andrzej Bartnik | 2002-10-22 |
| 6452194 | Radiation source for use in lithographic projection apparatus | Frederik Bijkerk, Cornelis Cornelia De Bruijn, Andrzej Bartnik, Konstantin Nikolaevitch Koshelev, Vadim Yevgenyevich Banine | 2002-09-17 |