Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496306 | Catadioptric optical system and exposure apparatus having the same | Helmut Beierl, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich | 2002-12-17 |
| 6483638 | Ultra-broadband UV microscope imaging system with wide range zoom capability | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai | 2002-11-19 |
| 6392793 | High NA imaging system | Yung-Ho Alex Chuang, Bin-Ming Benjamin Tsai, J. Joseph Armstrong | 2002-05-21 |
| 6362923 | Lens for microscopic inspection | Steve R. Lange | 2002-03-26 |