Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6483638 | Ultra-broadband UV microscope imaging system with wide range zoom capability | David Shafer, Yung-Ho Alex Chuang | 2002-11-19 |
| 6445199 | Methods and apparatus for generating spatially resolved voltage contrast maps of semiconductor test structures | Akella V. S. Satya, Brian C. Leslie, Gustavo A. Pinto, Robert Long, Neil Richardson | 2002-09-03 |
| 6433561 | Methods and apparatus for optimizing semiconductor inspection tools | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Brian C. Leslie | 2002-08-13 |
| 6392793 | High NA imaging system | Yung-Ho Alex Chuang, David Shafer, J. Joseph Armstrong | 2002-05-21 |