Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6496306 | Catadioptric optical system and exposure apparatus having the same | David Shafer, Gerhard Furter, Karl-Heinz Schuster, Wilhelm Ulrich | 2002-12-17 |
| 6424471 | Catadioptric objective with physical beam splitter | Willi Ulrich | 2002-07-23 |
| 6349005 | Microlithographic reduction objective, projection exposure equipment and process | Karl-Heinz Schuster | 2002-02-19 |