Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6453913 | Method of cleaning a film deposition apparatus, method of dry etching a film deposition apparatus, and an article production method including a process based on the cleaning or dry etching method | Yoshio Seqi, Hideaki Matsuoka, Koji Hitsuishi, Tetsuya Karaki | 2002-09-24 |
| 6435130 | Plasma CVD apparatus and plasma processing method | Satoshi Takaki, Yoshio Segi, Atsushi Yamagami, Hitoshi Murayama, Yasuyoshi Takai | 2002-08-20 |
| 6406554 | Method and apparatus for producing electrophotographic photosensitive member | Yoshio Segi, Hideaki Matsuoka, Yasuyoshi Takai | 2002-06-18 |
| 6391394 | Method for manufacturing electrophotographic photosensitive member and jig used therein | Toshiyasu Shirasuna, Yoshio Segi | 2002-05-21 |
| 6335281 | Deposited film forming process | Yoshio Segi, Hideaki Matsuoka, Yasuyoshi Takai | 2002-01-01 |