Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6453913 | Method of cleaning a film deposition apparatus, method of dry etching a film deposition apparatus, and an article production method including a process based on the cleaning or dry etching method | Hiroyuki Katagiri, Hideaki Matsuoka, Koji Hitsuishi, Tetsuya Karaki | 2002-09-24 |