Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6453913 | Method of cleaning a film deposition apparatus, method of dry etching a film deposition apparatus, and an article production method including a process based on the cleaning or dry etching method | Hiroyuki Katagiri, Yoshio Seqi, Koji Hitsuishi, Tetsuya Karaki | 2002-09-24 |
| 6406554 | Method and apparatus for producing electrophotographic photosensitive member | Hiroyuki Katagiri, Yoshio Segi, Yasuyoshi Takai | 2002-06-18 |
| 6335281 | Deposited film forming process | Yoshio Segi, Hiroyuki Katagiri, Yasuyoshi Takai | 2002-01-01 |