Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435130 | Plasma CVD apparatus and plasma processing method | Yoshio Segi, Atsushi Yamagami, Hiroyuki Katagiri, Hitoshi Murayama, Yasuyoshi Takai | 2002-08-20 |
ST
Satoshi Takaki
Overall (2002): #121,820 of 266,432Top 50%
1
Patents 2002