Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468718 | Radiation absorbing polymer, composition for radiation absorbing coating, radiation absorbing coating and application thereof as anti-reflective coating | Wen-Bing Kang, Hatsuyuki Tanaka, Ken Kimura, Takanori Kudo, Georg Pawlowski | 2002-10-22 |
| 6447980 | Photoresist composition for deep UV and process thereof | M. Dalil Rahman, Ralph R. Dammel | 2002-09-10 |
| 6365322 | Photoresist composition for deep UV radiation | Ralph R. Dammel | 2002-04-02 |