Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468718 | Radiation absorbing polymer, composition for radiation absorbing coating, radiation absorbing coating and application thereof as anti-reflective coating | Wen-Bing Kang, Munirathna Padmanaban, Ken Kimura, Takanori Kudo, Georg Pawlowski | 2002-10-22 |
| 6465148 | Composition for light absorption film formation containing blocked isocyanate compound and antireflection film formed therefrom | Wen-Bing Kang, Ken Kimura, Shoko Matsuo, Yoshinori Nishiwaki | 2002-10-15 |
| 6465161 | Method for forming resist pattern | Wen-Bing Kang, Shoko Matsuo, Ken Kimura, Yoshinori Nishiwaki | 2002-10-15 |