Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447980 | Photoresist composition for deep UV and process thereof | M. Dalil Rahman, Munirathna Padmanaban | 2002-09-10 |
| 6372414 | Lift-off process for patterning fine metal lines | Randy D. Redd, John P. Sagan, Mark A. Spak | 2002-04-16 |
| 6365322 | Photoresist composition for deep UV radiation | Munirathna Padmanaban | 2002-04-02 |