Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6391800 | Method for patterning a substrate with photoresist | Lawrence S. Klingbeil, Jr. | 2002-05-21 |
| 6372414 | Lift-off process for patterning fine metal lines | Ralph R. Dammel, John P. Sagan, Mark A. Spak | 2002-04-16 |