Issued Patents 2002
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462305 | Method of manufacturing a polishing pad using a beam | Annette M. Crevasse, William Easter | 2002-10-08 |
| 6423149 | Apparatus and method for gradient cleaning of semiconductor wafers | Annette M. Crevasse, William Easter, John A. Maze | 2002-07-23 |
| 6402599 | Slurry recirculation system for reduced slurry drying | Annette M. Crevasse, William Easter, John A. Maze, Craig R. Zavilla | 2002-06-11 |
| 6373945 | Terminal block extension for greater wire packing efficiency | William Easter, Dale Evans, John A. Maze, Jose Omar Rodriguez | 2002-04-16 |
| 6369799 | Computer pointer device for handicapped persons | John A. Maze, William Easter | 2002-04-09 |
| 6368190 | Electrochemical mechanical planarization apparatus and method | William Easter, John A. Maze | 2002-04-09 |
| 6368955 | Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities | William Easter, John A. Maze | 2002-04-09 |
| 6354910 | Apparatus and method for in-situ measurement of polishing pad thickness loss | Richardson O. Adebanjo, William Easter, Alvaro Maury, Jose Omar Rodriguez | 2002-03-12 |
| 6355184 | Method of eliminating agglomerate particles in a polishing slurry | Annette M. Crevasse, William Easter, John A. Maze, Sailesh Mansinh Merchant | 2002-03-12 |
| 6354928 | Polishing apparatus with carrier ring and carrier head employing like polarities | Annette M. Crevasse, William Easter, John A. Maze | 2002-03-12 |