Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6462305 | Method of manufacturing a polishing pad using a beam | William Easter, Frank Miceli | 2002-10-08 |
| 6423149 | Apparatus and method for gradient cleaning of semiconductor wafers | William Easter, John A. Maze, Frank Miceli | 2002-07-23 |
| 6402599 | Slurry recirculation system for reduced slurry drying | William Easter, John A. Maze, Frank Miceli, Craig R. Zavilla | 2002-06-11 |
| 6354928 | Polishing apparatus with carrier ring and carrier head employing like polarities | William Easter, John A. Maze, Frank Miceli | 2002-03-12 |
| 6355184 | Method of eliminating agglomerate particles in a polishing slurry | William Easter, John A. Maze, Sailesh Mansinh Merchant, Frank Miceli | 2002-03-12 |