Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372605 | Additional etching to decrease polishing time for shallow-trench isolation in semiconductor processing | Stephen C. Kuehne, Scott F. Shive | 2002-04-16 |
| 6368972 | Method for making an integrated circuit including alignment marks | Scott F. Shive | 2002-04-09 |
| 6354910 | Apparatus and method for in-situ measurement of polishing pad thickness loss | Richardson O. Adebanjo, William Easter, Frank Miceli, Jose Omar Rodriguez | 2002-03-12 |