Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6372605 | Additional etching to decrease polishing time for shallow-trench isolation in semiconductor processing | Stephen C. Kuehne, Alvaro Maury | 2002-04-16 |
| 6368972 | Method for making an integrated circuit including alignment marks | Alvaro Maury | 2002-04-09 |
| 6362054 | Method for fabricating MOS device with halo implanted region | Seungmoo Choi, Donald Thomas Cwynar, Timothy Edward Doyle, Felix Llevada | 2002-03-26 |