Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354910 | Apparatus and method for in-situ measurement of polishing pad thickness loss | William Easter, Alvaro Maury, Frank Miceli, Jose Omar Rodriguez | 2002-03-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6354910 | Apparatus and method for in-situ measurement of polishing pad thickness loss | William Easter, Alvaro Maury, Frank Miceli, Jose Omar Rodriguez | 2002-03-12 |