Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486081 | Gas distribution system for a CVD processing chamber | Tetsuya Ishikawa, Feng Gao, Alan W. Collins, Lily Pang | 2002-11-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6486081 | Gas distribution system for a CVD processing chamber | Tetsuya Ishikawa, Feng Gao, Alan W. Collins, Lily Pang | 2002-11-26 |