Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500357 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Claes Bjorkman, Gerald Yin | 2002-12-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500357 | System level in-situ integrated dielectric etch process particularly useful for copper dual damascene | Lee Luo, Claes Bjorkman, Gerald Yin | 2002-12-31 |