Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6432819 | Method and apparatus of forming a sputtered doped seed layer | Murali Narasimhan | 2002-08-13 |
| 6391163 | Method of enhancing hardness of sputter deposited copper films | Murali Abburi, Murali Narasimhan, Seshadri Ramaswami | 2002-05-21 |
| 6372301 | Method of improving adhesion of diffusion layers on fluorinated silicon dioxide | Murali Narasimhan, Kenny King-Tai Ngan, Xiangbing Li | 2002-04-16 |