Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6499502 | Method and device for filling a distribution line with corrosive gas | Jean-Marc Girard, Eric Duchateau, Bertrand Lefevre | 2002-12-31 |
| 6493086 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | Hwa-Chi Wang, Benjamin Jurcik | 2002-12-10 |
| 6442736 | Semiconductor processing system and method for controlling moisture level therein | Jean-Marc Girard, Benjamin Jurcik, Jean-Michel Friedt | 2002-08-27 |
| 6421127 | Method and system for preventing deposition on an optical component in a spectroscopic sensor | Benjamin Jurcik, Carol Schnepper, Ronald S. Inman, Dmitry Znamensky, Tracey Jacksier | 2002-07-16 |
| 6341521 | Process and device for measuring the amount of impurities in a gas sample to be analyzed | Mélanie Bartolomey, Jean-Marc Girard, Patrick Mauvais | 2002-01-29 |