Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493086 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | James McAndrew, Benjamin Jurcik | 2002-12-10 |
| 6392745 | Method and apparatus for the fast detection of surface characteristics | Rashid Mavliev | 2002-05-21 |
| 6363728 | System and method for controlled delivery of liquefied gases from a bulk source | Richard J. Udischas, Benjamin Jurcik, Robert G. Irwin | 2002-04-02 |