Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6493086 | Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use | James McAndrew, Hwa-Chi Wang | 2002-12-10 |
| 6442736 | Semiconductor processing system and method for controlling moisture level therein | Jean-Marc Girard, Jean-Michel Friedt, James McAndrew | 2002-08-27 |
| 6421127 | Method and system for preventing deposition on an optical component in a spectroscopic sensor | James McAndrew, Carol Schnepper, Ronald S. Inman, Dmitry Znamensky, Tracey Jacksier | 2002-07-16 |
| 6363626 | Method and device for treating items stored in containers and storage apparatus equipped with such a device | Denis Fiorillo, Sebastien Charles | 2002-04-02 |
| 6363728 | System and method for controlled delivery of liquefied gases from a bulk source | Richard J. Udischas, Hwa-Chi Wang, Robert G. Irwin | 2002-04-02 |