Issued Patents 2002
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495887 | Argon implantation after silicidation for improved floating-body effects | Srinath Krishnan, Matthew S. Buynoski | 2002-12-17 |
| 6492209 | Selectively thin silicon film for creating fully and partially depleted SOI on same wafer | Srinath Krishnan, Matthew S. Buynoski | 2002-12-10 |
| 6486038 | Method for and device having STI using partial etch trench bottom liner | Ming-Ren Lin, Qi Xiang | 2002-11-26 |
| 6465847 | Semiconductor-on-insulator (SOI) device with hyperabrupt source/drain junctions | Srinath Krishnan | 2002-10-15 |
| 6444534 | SOI semiconductor device opening implantation gettering method | — | 2002-09-03 |
| 6429054 | Method of fabricating semiconductor-on-insulator (SOI) device with hyperabrupt source/drain junctions | Srinath Krishnan | 2002-08-06 |
| 6399452 | Method of fabricating transistors with low thermal budget | Srinath Krishnan | 2002-06-04 |
| 6362063 | Formation of low thermal budget shallow abrupt junctions for semiconductor devices | Srinath Krishnan, Shekhar Pramanick | 2002-03-26 |