Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481277 | Temperature control unit and sight glass | Gerry Peffer, Vincent L. Marinaro | 2002-11-19 |
| 6418946 | Apparatus for automatically cleaning resist nozzle | Vincent L. Marinaro, Eric Kent | 2002-07-16 |
| 6368985 | Dual track/stepper interface configuration for wafer processing | Vince L. Marinaro, Eric Kent | 2002-04-09 |
| 6360959 | Dual resist dispense nozzle for wafer tracks | Eric Kent, Vince L. Marinaro | 2002-03-26 |
| 6336960 | System and method for purging air bubbles from filters | Vince L. Marinaro, Eric Kent | 2002-01-08 |