Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6481277 | Temperature control unit and sight glass | Ted Wakamiya, Gerry Peffer | 2002-11-19 |
| 6418946 | Apparatus for automatically cleaning resist nozzle | Eric Kent, Ted Wakamiya | 2002-07-16 |
| 6361599 | Mechanism for dispensing liquid onto an integrated circuit wafer with minimized back-splash | Eric Kent | 2002-03-26 |