Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6368985 | Dual track/stepper interface configuration for wafer processing | Ted Wakamiya, Eric Kent | 2002-04-09 |
| 6360959 | Dual resist dispense nozzle for wafer tracks | Eric Kent, Ted Wakamiya | 2002-03-26 |
| 6336960 | System and method for purging air bubbles from filters | Ted Wakamiya, Eric Kent | 2002-01-08 |