Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492210 | Method for fully self-aligned FET technology | Karsten Wieczorek, Rolf Stephan, Michael Raab | 2002-12-10 |
| 6491799 | Method for forming a thin dielectric layer | Frederick N. Hause, Karsten Wieczorek | 2002-12-10 |
| 6436724 | Method of monitoring the temperature of a rapid thermal anneal process in semiconductor manufacturing and a test wafer for use in this method | Karsten Wieczorek, Christian Krüger | 2002-08-20 |
| 6410410 | Method of forming lightly doped regions in a semiconductor device | Thomas Feudel, Karsten Wieczorek | 2002-06-25 |
| 6358826 | Device improvement by lowering LDD resistance with new spacer/silicide process | Frederick N. Hause, Karsten Wieczorek | 2002-03-19 |
| 6352885 | Transistor having a peripherally increased gate insulation thickness and a method of fabricating the same | Karsten Wieczorek, Frederick N. Hause | 2002-03-05 |
| 6344397 | Semiconductor device having a gate electrode with enhanced electrical characteristics | Karsten Wieczorek, Bernd Engelmann | 2002-02-05 |