Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6436724 | Method of monitoring the temperature of a rapid thermal anneal process in semiconductor manufacturing and a test wafer for use in this method | Karsten Wieczorek, Manfred Horstmann | 2002-08-20 |