Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495853 | Self-aligned gate semiconductor | Jiahua Huang, Sunny Cherian | 2002-12-17 |
| 6472326 | Reliable particle removal following a process chamber wet clean | Greg A. Johnson, Darlene Smith, Omar Serna, Theodros W. Mariam | 2002-10-29 |
| 6448163 | Method for fabricating T-shaped transistor gate | Sunny Cherian, Zoran Krivokapic | 2002-09-10 |
| 6383945 | High selectivity pad etch for thick topside stacks | Jiahua Huang, Jeffrey A. Shields | 2002-05-07 |
| 6358362 | Methods and arrangements for determining an endpoint for an in-situ local interconnect etching process | William G. En, Fei Wang | 2002-03-19 |
| 6358760 | Method for amorphous silicon local interconnect etch | Jiahua Huang, James Chiang, Sunny Cherian | 2002-03-19 |