Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472326 | Reliable particle removal following a process chamber wet clean | Allison Holbrook, Greg A. Johnson, Darlene Smith, Theodros W. Mariam | 2002-10-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6472326 | Reliable particle removal following a process chamber wet clean | Allison Holbrook, Greg A. Johnson, Darlene Smith, Theodros W. Mariam | 2002-10-29 |