Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458984 | Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS) | Thomas H. Baum, Chongying Xu, Frank R. Hedges, Brian L. Benac, Scott L. Battle +1 more | 2002-10-01 |
| 6344432 | Formulations including a 1,3-dicarbonyl compound chelating agent and copper corrosion inhibiting agents for stripping residues from semiconductor substrates containing copper structures | William A. Wojtczak, Ma. Fatima Seijo, Long Nguyen | 2002-02-05 |