Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458984 | Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS) | Thomas H. Baum, Chongying Xu, Frank R. Hedges, David Bernhard, Brian L. Benac +1 more | 2002-10-01 |