Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458984 | Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS) | Thomas H. Baum, Frank R. Hedges, David Bernhard, Brian L. Benac, Scott L. Battle +1 more | 2002-10-01 |
| 6440202 | Pyrazolate copper complexes, and MOCVD of copper using same | Thomas H. Baum, Ziyun Wang | 2002-08-27 |
| 6417369 | Pyrazolate copper complexes, and MOCVD of copper using same | Thomas H. Baum, Ziyun Wang | 2002-07-09 |
| 6340769 | Method of fabricating iridium-based materials and structures on substrates, and iridium source reagents therefor | Thomas H. Baum | 2002-01-22 |
| 6337148 | Copper source reagent compositions, and method of making and using same for microelectronic device structures | Thomas H. Baum | 2002-01-08 |