Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6492310 | Boric acid containing compositions for stripping residues from semiconductor substrates | William A. Wojtczak, George Guan | 2002-12-10 |
| 6409781 | Polishing slurries for copper and associated materials | William A. Wojtczak, Thomas H. Baum, Cary Regulski | 2002-06-25 |
| 6383410 | Selective silicon oxide etchant formulation including fluoride salt, chelating agent, and glycol solvent | William A. Wojtczak, Stephen A. Fine | 2002-05-07 |
| 6344432 | Formulations including a 1,3-dicarbonyl compound chelating agent and copper corrosion inhibiting agents for stripping residues from semiconductor substrates containing copper structures | William A. Wojtczak, Ma. Fatima Seijo, David Bernhard | 2002-02-05 |