Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5605776 | Phase-shifting photomask blank, phase-shifting photomask, and method of manufacturing them | Akihiko Isao, Susumu Kawada, Atsushi Hayashi, Nobuyuki Yoshioka | 1997-02-25 |