Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5609737 | Film manufacturing method using single reaction chamber for chemical-vapor deposition and sputtering | Masanori Miyazaki, Masami Aihara, Chisato Iwasaki, Koichi Fukuda, Yasuhiko Kasama | 1997-03-11 |
| 5605576 | High frequency magnetron plasma apparatus | Makoto Sasaki, Masami Aihara, Tadahiro Ohmi | 1997-02-25 |