Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5681487 | Method of removing photoresist film | Hitoshi Seki, Akane Sekiya, Yasuhiko Kasama, Tadahiro Ohmi | 1997-10-28 |
| 5623161 | Electronic element and method of producing same | Koichi Fukuda, Tomofumi Oba, Yasuhiko Kasama, Tadahiro Ohmi | 1997-04-22 |
| 5609737 | Film manufacturing method using single reaction chamber for chemical-vapor deposition and sputtering | Hirofumi Fukui, Masanori Miyazaki, Masami Aihara, Koichi Fukuda, Yasuhiko Kasama | 1997-03-11 |