Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5609737 | Film manufacturing method using single reaction chamber for chemical-vapor deposition and sputtering | Hirofumi Fukui, Masami Aihara, Chisato Iwasaki, Koichi Fukuda, Yasuhiko Kasama | 1997-03-11 |