Issued Patents 1997
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5661084 | Method for contact profile improvement | So Wein Kuo | 1997-08-26 |
| 5654234 | Method for forming a void-free tungsten-plug contact in the presence of a contact opening overhang | Chen-Hua Yu | 1997-08-05 |
| 5641382 | Method to remove residue of metal etch | Chih-Chien Hung, Yuan-Chang Huang | 1997-06-24 |