Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668054 | Process for fabricating tantalum nitride diffusion barrier for copper matallization | Hien-Tien Chiu, Ming-Hsing Tsai | 1997-09-16 |
| 5652166 | Process for fabricating dual-gate CMOS having in-situ nitrogen-doped polysilicon by rapid thermal chemical vapor deposition | Lin Wang | 1997-07-29 |