Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668054 | Process for fabricating tantalum nitride diffusion barrier for copper matallization | Shi-Chung Sun, Ming-Hsing Tsai | 1997-09-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5668054 | Process for fabricating tantalum nitride diffusion barrier for copper matallization | Shi-Chung Sun, Ming-Hsing Tsai | 1997-09-16 |