SY

Shau-Tsung Yu

TSMC: 1 patents #44 of 161Top 30%
Overall (1997): #76,991 of 185,788Top 45%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5652172 Method for controlling the etch profile of an aperture formed through a multi-layer insulator layer Peng Yung-Sung, An-Min Chiang, Min-Yi Lin 1997-07-29