Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652172 | Method for controlling the etch profile of an aperture formed through a multi-layer insulator layer | An-Min Chiang, Shau-Tsung Yu, Min-Yi Lin | 1997-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5652172 | Method for controlling the etch profile of an aperture formed through a multi-layer insulator layer | An-Min Chiang, Shau-Tsung Yu, Min-Yi Lin | 1997-07-29 |