Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639342 | Method of monitoring and controlling a silicon nitride etch step | Wen-Cheng Chang, Heng-Hsin Liu, Bao Ru Yang | 1997-06-17 |
| 5633210 | Method for forming damage free patterned layers adjoining the edges of high step height apertures | Bao Ru Yang, Wen-Cheng Chang, Po-Tau Chu | 1997-05-27 |