Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5639342 | Method of monitoring and controlling a silicon nitride etch step | Sen-Fu Chen, Wen-Cheng Chang, Bao Ru Yang | 1997-06-17 |
HL
Heng-Hsin Liu
Overall (1997): #143,382 of 185,788Top 80%
1
Patents 1997