Issued Patents 1997
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5633210 | Method for forming damage free patterned layers adjoining the edges of high step height apertures | Bao Ru Yang, Sen-Fu Chen, Wen-Cheng Chang | 1997-05-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5633210 | Method for forming damage free patterned layers adjoining the edges of high step height apertures | Bao Ru Yang, Sen-Fu Chen, Wen-Cheng Chang | 1997-05-27 |