Issued Patents 1997
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5688719 | Method for plasma hardening of patterned photoresist layers | Sung-Mu Hsu | 1997-11-18 |
| 5674775 | Isolation trench with a rounded top edge using an etch buffer layer | Chin-Hsiung Ho, Cheng-Kai Liu, Chaochieh Tsai | 1997-10-07 |
| 5670426 | Method for reducing contact resistance | So-Wen Kuo | 1997-09-23 |
| 5620817 | Fabrication of self-aligned attenuated rim phase shift mask | Jung-Hsien Hsu, Chung-Kuang Lee | 1997-04-15 |