Issued Patents 1997
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5679214 | Method of maintaining a strong endpoint detection signal for RIE processes, via use of an insitu dry clean procedure | — | 1997-10-21 |
| 5670426 | Method for reducing contact resistance | Chia-Shiung Tsai | 1997-09-23 |