SH

Sung-Mu Hsu

TSMC: 1 patents #44 of 161Top 30%
Overall (1997): #73,669 of 185,788Top 40%
1
Patents 1997

Issued Patents 1997

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5688719 Method for plasma hardening of patterned photoresist layers Chia-Shiung Tsai 1997-11-18